leybold optics

VAKPOL & GAZ
ul. Czeremchowa 10
53-009 Wrocław
Zygmunt Kamola
Paweł Winkowski
[email protected]
www.vakpol.com
CBK
Warszawa 2012
LEYBOLD OPTICS
INFICON
UIC
ALD
CBK Warszawa
2012
Working independently
Professor W. Gaede
Professor Max Auwärter
Heraeus Hochvakuum
Professor Auwärter
Degussa AG becomes
Effective October 1st,
Under the sheltering roof
Oerlikon-Buehrle Holding AG renames
of each other, company
develops the first
leaves the vacuum
GmbH merges with
leaves Balzers.
sole owner of Leybold-
Degussa sells all ist stock
of a single joint holding
to Unaxis in 2000. Focus for Unaxis is
founders Ernst Leybold
high vacuum devices
Technology department
Leybold to form Leybold-
Oerlikon-Bührle now
Heraeus GmbH, which
in LEYBOLD AG to
company, eight separate
Information Technology.
in Cologne and Wilhelm
in Cologne.
at Heraeus.
Heraeus GmbH.
becomes sole owner of
changes its name to
Oerlikon-Bührle Holding
Business Units operate
LEYBOLD OPTICS is going independent
the Balzers Group.
Leybold AG.
AG of Zurich.
indepently.
as manufacturer of coating systems for
Carl Heraeus in Hanau
With Prince Franz
Sales exceed
lay separate foundations
Dr. W. Rohn develops
Josef II and Emil Georg
100 million DM
for subsequent high-tech
the chromium-nickel
Bührle, Professor
firms.
process as substitute
Auwärter founds the
for platinum.
Gerätebau-Anstalt
Balzers in Liechtenstein.
The merger of Balzers AG
and Leybold AG, creates
one of the world´s largest
enterprises in the field of
vacuum and thin film
technology.
Ernst Leybold (1824-1907)
Cologne
LEYBOLD
W.C. HERAEUS
Hanau
Wilhelm Carl Heraeus
(1827-1904)
GERÄTEBAUANSTALT
BALZERS
optical applicatioins with a worldwide
network of sales and service organisations.
As of Sept 30, 2001 Unaxis sells
LEYBOLD OPTICS to EQT, a private
Equity Fund founded by the Swedish
Wallenberg industrialist family.
INFICON History 1850 to 2004
1
4
2008 Template - January 2008
The Solution
ALD Vacuum Technologies AG
The Solution
ALD Technology & Markets
Vakuum
Metallurgy
Energyproduction
Leisure
Vakuum
Thermal
Recycling
Vakuum
Heat Treatment
Communication
Transportation/Aircraft
Transportation/Cars
Transportation/Aircraft
Tools
Recycling
Waste Treatment
30.05.2012 16:37
Folie 6
Strategic Target Markets
1999 – 200?
The Solution
Titanium
Parts
TiAl Valves
Metallurgy
Vacuum
Technology
Heat
Gear
Treatment Components
Recycling
30.05.2012 16:37
Folie 7
Turbine
Blades
SolarSilicon
Hydraulics
Injection
and
Systems Transmission
NiCd
PCB
Batteries
Hg Wastes Contaminated Activated
Waste
Carbon
Automotive
and
Airacraft
Parts
Household
Waste
SHORT
PATH DISTILATION
Feed mixture
Vacuum Distillation
Thin Film Distillation
Short Path Distillation
A and B
Paar exemples :
Monoglycerides
Diglycerides
Palm oils,
Tocopherol
Fish oil,
Rice bran oil
Fatty acids and derivatives
Cocoa butter,
Dimeric fatty acids ;
Lactic acid, Paprika oleoresin ;
Vegetable oils
Rotating
wiper system
A
B
See the light.
LEYBOLD OPTICS
at a Glance
"The bulk of a crystal
has been created by God –
The surface by the devil"
Wolfgang Pauli
LEYBOLD OPTICS - Product Portfolio
Applications in Ophthalmic & Health
Ophthalmics
Medical Components
Applications in Precision & Telecom
Telecommunication
Microlithography
Special Optics
DVDM filters !!!!
Applications in Reflection & Protection
Automotive
Plastics
Silicon Based Tandem Solar Cell Modules !!! New
Products using Leybold Optics technology
The LAB-Family
Inside dimension of the chamber (W x H x D):
LAB500: 500 x 650 x 520 mm
LAB600: 600 x 750 x 620 mm
LAB700: 700 x 950 x 720 mm
LAB900: 900 x 1150 x 920 mm
LAB1000: 1050 x 1000 x 1025 mm
LAB500
LAB900
LAB600 with Loadlook
LEYBOLD OPTICS Dresden GmbH
Page 5
Substrate Holder & Heater
Table
Pallete
Calotte (1 or 4 segments)
Motion Variants
- Massiv shaft with DC servo actuator or stepping motor
- Ferrofluidic‘s hollow shaft with positionable AC servo actuator drive
Substrate Heating
- IR-resistor heater ( 2,2kW )
- Quarz radiation heater ( 1 kW )
LEYBOLD OPTICS Dresden GmbH
Page 22
Coating Sources
Thermal evaporator
- Evaporation assembly
- High current generator AS053 (400A with 5V or 200A with 10V)
Sputter sources
-circular cathode 2“ ... 8“
-planar cathode PK500 and PK750
-double cathode Twinmag
Electron-beam evaporator
- ESV6, ESV14/4, ESV14/Q
- HV-generator switched with 5kW or 10 kW
- filament transformer switched
- E-gun controller unit EGC28
Ion beam sources
- Mark I
- Mark II
LEYBOLD OPTICS Dresden GmbH
Page 23
Thickness Measurement and Control
COATING THICKNESS MEASUREMENT
- IC/5 (Co deposition possible)
- XTC/2
- Standard and sputtering measuring heads
- Shutter assembly
- Double head sensor
- CrystalSixTM sensor
-Sample exchange
OPTICAL MEASUREMENT
SYSTEM OMS 5000
LEYBOLD OPTICS Dresden GmbH
Page 24
LAB 600UV with Load lock
Process chamber WxHxD 600x750x620mm
Load lock BxHxT 400x450x420mm
2x e-Gun ESV14/4
1x Ion source Mark II
15“ VAT gate valve
Coolvac 3011 with Ecodry/WSU251
Ultimate pressure <5*E-9mbar
moveable Substrate holder from PK to LL
rotable and turnable holder
19“ cabinet with all integrated devices
PLC with 11“ Touch Screen Terminal
LEYBOLD OPTICS Dresden GmbH
Page 29
LAB 900
Stainless steel chamber WxHxD
900 x 1150 x 920mm
2x e-Gun ESV14/4
1x Ion source Mark II
20“ VAT gate valve
Coolvac 10011 with Sogevac SV200
Rootsblower WSU501
4 part Substrate calotte with hollow shaft
2x 19“ cabinet with all integrated devices
PLC with 11“ Touch Screen Terminal
IC5 deposition controller with double head sensor
LEYBOLD OPTICS Dresden GmbH
Page 30
Sputter Inline A700 V
modular, vertical In-line sputtering system
mainly for glass coating
max. size of substrate 1000 x 600 mm,
loading size 260 mm (3D substrate)
bias capable transportation system
Substrate heating up to 400°C
switched matrix for power supply with
SINUS, PULS and DC generator
Load lock with storage of substrate
4x TWINMAG PK750 and 2x single PK750 for reactive process
PC-visualization with PLC and fieldbus
LEYBOLD OPTICS Dresden GmbH
Page 32
3D-COATING
Batch type systems
AluMet
series
(Vertical and
Horizontal)
PylonMet VXL
Load-Lock type (short cycle time) systems
DynaMet 3H
DynaMet 4V
DynaLine 4V /
DynaLine 5V
Systems are utilizing LEYBOLD OPTICS Coating Technology:
- Thermal Evaporation
- Inter Pole Target (IPT) Magnetron Sputtering
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
Confidential
New Product SYRUSpro
The New Generation Of Optical Coating System
SYRUSpro 900
SYRUSpro 1100
SYRUSpro 1500
•
New Quartz Crystal Monitoring System
XMS
•
New Optical Monitoring System
OMS 5000
•
New Electron Beam Evaporation Technology
HPE6 / HPE10
•
New Human Interface, Control System,
Process Control
SYRUSpro
Simulation
LEYBOLD OPTICS Dresden GmbH
Page 39
SYRUSpro News / Infinate Pattern Generation
Easy to get the correct pattern for
all your different materials,
different crucibles and
different pocket sizes
3D-COATING
Right Side Access
Dateiname.ppt
Confidential
3D-COATING
The machine
To exceed today’s
Requirements…
And tomorrow’s
Flexible demands
Confidential
3D-COATING
Gray Scale
Adjustable Reflectivity/Absorption
From brilliant mirror
to smoked metal impression
Virtually identical a* and b*
Only L* varied
Cross-view of the substrate and
the thin-film vacuum-coating layer:
Intrinsic,
reactive sputtered
layer
Substrate
Confidential
3D-COATING
Wide colour range
Adjustable colour (by interference layer thickness)
Single interference layer only
Cross-view of the substrate and
the thin-film vacuum-coating layer:
Interference Layer (Colour)
by reactive sputtering
Mirror layer by
sputtering
or NCVM layer
Substrate
Confidential
INFICON
Intelligent Sensor Solutions – quadrupole
mass spektrometer
Leak Detection
[ helium ,frigens, others ]
Vacuum measurment systems
Vacuum equipment
Strategic Business Units
Intelligent Sensor Solutions
Leak Detection
1
48
2008 Template - January 2008
Vacuum Control
Locations
Syracuse, NY, USA
Cologne, Germany
1
49
2008 Template - January 2008
Balzers, Liechtenstein
Scentograph
CMS100’s
internal battery and
gas supply make it
totally portable.
1
Large
Int. OEM
Private
Brand
Label
Diffuse Market of
Medium to Small Customers
Reps
Specialized
Distributors
Sales Potential per Customer
INFICON Sales Strategy
2008 Template - January 2008
Number of Customers
53
INFICON Vacuum Control OEM‘s
SEMI:
SOLAR:
Industrial:
1
54
2008 Template - January 2008
Pirani
Capacitance diaphragm
Pirani / Capacitance
Cold cathode
Hot ion (Bayard Alpert)
Hot ion / Pirani
TripleGauge™
10-7
10-6
10-5
10-4
10-3
10-2
10-1
100
101
102
103
104
105
106 Pascal
10-10 10-9
10-8
10-7
10-6
10-5
10-4
10-3
10-2
10-1
100
101
102
103
104 mbar
10-8
Ultra high vacuum
High vacuum
Medium vacuum
Rough vacuum
Sea level atmosphere
Interplanetary space
1
55
2008 Template - January 2008
Lower ionosphere
Top of high mountain
Triple Gauge™ BCG450
Bayard-Alpert Pirani Capacitance
Diaphragm Gauge
• 3 gauges in 1
(replaces hot ion, convection
enhanced Pirani & ATM switch)
• Gas-type-independent measurement
above 10 Torr
• Highly accurate
• Differential atmospheric switch
Heater grid
Etched wafer as
carrier material
Quartz Membrane
Helium
Nitrogen (air)
Sensor Design
Glass housing with feedthroughs
Pump connection
Wafer with
quartz windows
shield
Cathode
plate
1
58
Anode ring
2008 Template - January 2008
Detection limit :
10exp-7 [mbarl/s]
• Measurement range : 10exp-1
÷ 10exp-6
[ mbarl/s ]
• No turbo pumps
• Easy measurement without special vacuum systems
• only small difference pressure nedded
Valves & Fittings
1
66
2008 Template - January 2008
Interfaces
1
67
2008 Template - January 2008
I.
Metoda
I.
Czułość mbarl/s
1. Penetranty
10‾ ³ (10‾4 )
2.Ultradźwięki
10‾ ³
3.Próba wodna
10‾ ³ (10-4 )
4.Bańki mydlane;
NEKAL TEST; BUBLE-TEST
10‾ ³
5.SENSORY naj. generacji
10‾ ³
-
detektory, półprzewodniki
Wodór
6.FREONY
10-7
10‾ 5
(halogeny)
7.AMONIAK
5x10‾ 8
8.SF6
10‾ 6
9.SPEKTROMETRY
mas
10.HELOWY
10‾ 6 -
specjalizowany
10‾ 9
spektrometr
10‾12
11.RADIOIZOTOPY
Kr 85
10‾13
10‾ 6
Nasza firma poleca usługi w zakresie :
• Wykrywania nieszczelności na dowolnych obiektach
zarówno w próżni jak i dla obiektów pracujących
przy nadciśnieniu a stosowana przez nas
metoda helowa
pozwala na lokalizację nieszczelności w zakresie
od
•
10+3
do
10-10 mbarl/s
Dla innych gazów niż hel posiadany przez nas sprzęt
zapewnia czułość na poziomie
•
•
•
•
•
•
•
10-7 mbarl/s
Badania prowadzimy wg międzynarodowych norm
EN-1779 i EN -1518
Pomiarów próżni ,
Doboru pomp , diagnostyki technicznej urządzeń , modernizacje
Projektowania i budowy przemysłowych urządzeń do badania
szczelności w masowej produkcji,
Regeneracja izolacji próżniowej zbiorników kriogenicznych
Pomiary próżni izolacji zbiorników kriogenicznych
Próby pneumatyczne urządzeń ciśnieniowych
Kilka przykładów( z ponad 500 ) badań przemysłowych:
- instalacje chemiczne (zbiorniki, rurociągi )
- Cold-Box’y
- układy chłodzenia wodorem
generatorów energetycznych
- kondensory próżniowe w elektrowniach
- wymienniki ciepła ( spawy na dnach sitowych)
- całość prac szczelnościowych i
wytworzenie próżni izolacyjnej w zbiornikach
do ciekłego metanu ( LNG)
• zbiorniki ciekłych gazów - badanie szczelności ,
regeneracja izolacji próżniowej zbiorników na ciekłe gazy
• próba pneumatyczna zbiornika 100 m3 na wodór [ 62 barów]
połączona z badaniem szczelności oraz próżniowym
osuszeniem zbiornika do 5 ppm H2
Questions
1
71
2008 Template - January 2008
Dziękuję za uwagę.
W razie pytań proszę o kontakt:
Zygmunt Kamola +48 602 315 212
e-mail: [email protected]
[email protected]
www.vakpol.com
www.inficon.com